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%\addbibresource{Literatur/Literatur.bib}

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% Quelle: https://tex.stackexchange.com/questions/681700
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\newcommand{\ctab}[2][c]{%
  \renewcommand{\arraystretch}{1}%
  \begin{tabular}[#1]{@{}c@{}}#2\end{tabular}%
}

\begin{document}
\clearpage
\appendix
\section{Tables}
\setcounter{page}{1}

\begin{table}[htbp]
  \centering
  \footnotesize
  \renewcommand{\arraystretch}{1.5}
  \centerline{%
  \begin{tabular}{|l|*8{c|}}
  \hline
  Layer & Temperature & \ctab[t]{plasma\\mode} & \ctab[t]{power\\density} 
  & \ctab[t]{pulse\\on/off}  & \ctab[t]{substrate\\potential} & frequency 
  & \ctab[t]{gas flow\\Ar} & \ctab[t]{gas flow\\\ch{O2} /\ch{N2}}\\
  & $[\unit{\degreeCelsius}]$ &
  & $\left[\unit{\watt\per\centi\meter\squared}\right]$ 
  & $[\unit{\micro\second}]$ & $[\unit{\volt}]$ 
  & $[\unit{\kilo\hertz}]$ & $[\unit{\sccm}]$ & $[\unit{\sccm}]$ \\
  \hline
  \ch{AlN} & 580 & \ctab{pulsed\\DCMS} & 6.82 & 2.4 /1.6 & floating & 250 & 200 & 60 \\ 
  \hline
  MAX & 580 & DCMS & 2.27 & -- & floating & -- & 210 & -- \\ \hline
  \ch{Al2O3} & 580 & \ctab{pulsed\\DCMS} & 6.82 & 2.4 /1.6 & floating & 250 & 200 & 55 \\ 
  \hline
  \end{tabular}}
  \caption{Example parameters for the deposition of a \ch{AlN-MAX-Al2O3}-multilayer system.}
  \label{tab:Beispielparameter}
\end{table}
\end{document}

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\usepackage{physics}
\usepackage{color}


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\usepackage{chemformula}

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\usepackage{hyperref}


\begin{document}
\appendix
\section{Tables}
\setcounter{page}{1}



\begin{landscape}
\begin{table}
\centering
\begin{tabular}{|l|c|c|c|c|c|c|c|c|}
\hline
\begin{tabular}[c]{@{}l@{}}Layer\\ ~\\ ~\end{tabular} & \begin{tabular}[c]{@{}c@{}}Temperature\\ ~\\ $[\SI{}{\celsius}]$\end{tabular} & \begin{tabular}[c]{@{}c@{}}plasma\\ mode\\ ~\end{tabular} & \begin{tabular}[c]{@{}c@{}}power density\\ \\ $[\SI{}{\watt\per\centi\meter\squared}]$\end{tabular} & \begin{tabular}[c]{@{}c@{}}pulse\\ on /off\\ $[\SI{}{\micro\second}]$\end{tabular} & \begin{tabular}[c]{@{}c@{}}substrate potential\\ \\ $[V]$\end{tabular} & \begin{tabular}[c]{@{}c@{}}frequency\\ \\ $[\SI{}{\kilo\hertz}]$\end{tabular} & \begin{tabular}[c]{@{}c@{}}gas flow\\ Ar\\ $[\SI{}{\sccm}]$\end{tabular} & \begin{tabular}[c]{@{}c@{}}gas flow \\ \ch{O2} /\ch{N2}\\ $[\SI{}{\sccm}]$\end{tabular} \\ \hline
\ch{AlN} & 580 & \begin{tabular}[c]{@{}c@{}}pulsed\\ DCMS\end{tabular} & 6.82 & 2.4 /1.6 & floating & 250 & 200 & 60 \\ \hline
MAX & 580 & DCMS & 2.27 & - & floating & - & 210 & - \\ \hline
\ch{Al2O3} & 580 & \begin{tabular}[c]{@{}c@{}}pulsed\\ DCMS\end{tabular} & 6.82 & 2.4 /1.6 & floating & 250 & 200 & 55 \\ \hline
\end{tabular}
\caption{Example parameters for the deposition of a \ch{AlN-MAX-Al2O3}-multilayer system.}
\label{tab:Beispielparameter}
\end{table}
\end{landscape}


\end{document}